JPH0726842Y2 - ウエハ用バスケット - Google Patents

ウエハ用バスケット

Info

Publication number
JPH0726842Y2
JPH0726842Y2 JP1991031383U JP3138391U JPH0726842Y2 JP H0726842 Y2 JPH0726842 Y2 JP H0726842Y2 JP 1991031383 U JP1991031383 U JP 1991031383U JP 3138391 U JP3138391 U JP 3138391U JP H0726842 Y2 JPH0726842 Y2 JP H0726842Y2
Authority
JP
Japan
Prior art keywords
basket
wafer
mark
identification mark
mark plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP1991031383U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0497347U (en]
Inventor
水 賢 司 清
子 秀 洋 益
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Valqua Industries Ltd
Original Assignee
Nippon Valqua Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Valqua Industries Ltd filed Critical Nippon Valqua Industries Ltd
Priority to JP1991031383U priority Critical patent/JPH0726842Y2/ja
Publication of JPH0497347U publication Critical patent/JPH0497347U/ja
Application granted granted Critical
Publication of JPH0726842Y2 publication Critical patent/JPH0726842Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Packaging Frangible Articles (AREA)
JP1991031383U 1990-06-01 1991-05-08 ウエハ用バスケット Expired - Lifetime JPH0726842Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1991031383U JPH0726842Y2 (ja) 1990-06-01 1991-05-08 ウエハ用バスケット

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2-58037 1990-06-01
JP5803790 1990-06-01
JP1991031383U JPH0726842Y2 (ja) 1990-06-01 1991-05-08 ウエハ用バスケット

Publications (2)

Publication Number Publication Date
JPH0497347U JPH0497347U (en]) 1992-08-24
JPH0726842Y2 true JPH0726842Y2 (ja) 1995-06-14

Family

ID=31948442

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1991031383U Expired - Lifetime JPH0726842Y2 (ja) 1990-06-01 1991-05-08 ウエハ用バスケット

Country Status (1)

Country Link
JP (1) JPH0726842Y2 (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3370279B2 (ja) * 1998-07-07 2003-01-27 信越ポリマー株式会社 精密基板収納容器
JP4519056B2 (ja) * 2005-10-27 2010-08-04 信越ポリマー株式会社 精密基板収納容器

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62163949U (en]) * 1986-04-09 1987-10-17

Also Published As

Publication number Publication date
JPH0497347U (en]) 1992-08-24

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Legal Events

Date Code Title Description
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 19960109